A method is described for combining the diverse strengths of two materials
in a tiled film construction. The first material provides a foundation of
intersecting grid lines on a substrate and the second material is
contained within the grid lines and has a valued property for a
particular application. In a preferred embodiment, a tiled dielectric
layer has improved low-k dielectric performance while avoiding film
stress problems that can lead to delamination or cracking. CTE mismatch
is overcome at the cost of an additional masking step. This tiling method
and layered binary construction enable Cytop to be used as a high
performance low-k dielectric on most substrates including semiconductor
wafers and copper panels or foils.