An exposure method exposes a substrate by projecting an image of a
predetermined pattern through a liquid onto the substrate by using a
projection optical system. The exposure method includes supplying the
liquid onto a part of the substrate including a projection area of the
projection optical system to form a liquid immersion area, the liquid
having an affinity for a liquid contact surface disposed at an end of the
projection optical system, the affinity being higher than an affinity for
a surface of the substrate, and projecting the image of the predetermined
pattern onto the substrate through the liquid supplied to the liquid
immersion area.