A method and apparatus for simultaneous high-speed inspection and
acquisition of multiple data channels is provided. The method and
apparatus enables inspecting semiconductor wafers and reticles and
comprises converting a single image region into two image sections,
reorienting one image into a transposed configuration enabling
simultaneous scanning of two inspected object locations with a single
sensor, and controlling acquisition parameters for a second image by
using information collected from a first image in a feedback arrangement.
The design provides a dual-linear or time-delay-integration sensor
operating in a split readout configuration mode to simultaneously provide
data from two regions of the sensor using two sets of readout circuitry.