The present invention provides a material for an antireflective film
characterized by high etching selectivity with respect to a resist, that
is, which has a fast etching speed when compared to the resist, and in
addition, can be removed without damage to a film which is to be
processed. The present invention also provides a pattern formation method
for forming an antireflective film layer on a substrate using this
antireflective film-forming composition, and a pattern formation method
that uses this antireflective film as a hard mask, and a pattern
formation method that uses this antireflective film as a hard mask for
processing the substrate. The present invention also provides an
antireflective film-forming composition comprising an organic solvent, a
cross linking agent, and a polymer comprising a light absorbing group
obtained by hydrolyzing and condensing more than one type of silicon
compound, a crosslinking group and a non-crosslinking group.