A positive resist composition comprises (A) a resin component which
becomes soluble in an alkaline developer under the action of an acid, and
(B) an acid generator. The resin (A) is a polymer comprising tertiary
alkyl protective group units having a hydrophobic
tetracyclo[4.4.0.1.sup.2,5.1.sup.7,10]-dodecane structure,
hydroxyadamantane units, monocyclic lactone units, and carboxylic acid
units. The acid generator (B) is a specific sulfonium salt compound.