An optical scanning apparatus includes an in-plane vibratory mass platform
having at least one diffraction grating formed thereon as the scanning
element, at least one flexure structure that connects the mass platform
to at least one fixed support, and at least one driving actuator that
drives the mass platform into an in-plane vibratory motion which can be
rotational and/or translational. The apparatus may also be formed by a
mass platform having at least one diffraction grating formed thereon as
the scanning element, at least one driving actuator connected to the mass
platform through at least one flexure structure. The driving actuator
drives the mass platform into an in-plane vibratory motion.