Methods of creating isolated electrodes and integrating a nanowire
therebetween each employ lateral epitaxial overgrowth of a semiconductor
material on a semiconductor layer to form isolated electrodes having the
same crystal orientation. The methods include selective epitaxial growth
of a semiconductor feature through a window in an insulating film on the
semiconductor layer. A vertical stem is in contact with the semiconductor
layer through the window and a ledge is a lateral epitaxial overgrowth of
the vertical stem on the insulating film. The methods further include
creating a pair of isolated electrodes from the semiconductor feature and
the semiconductor layer. A nanowire-based device includes the pair of
isolated electrodes and a nanowire bridging between respective surfaces
of the isolated electrodes of the pair.