A method of manufacturing a semiconductor package includes mounting and
electrically connecting a semiconductor die to a substrate. The
semiconductor die and the substrate are encapsulated to form an
encapsulation. Via holes are laser-ablated through the encapsulation and
conductive material is deposited within the via holes to form vias. A
first buildup dielectric layer is formed on the encapsulation.
Laser-ablated artifacts are laser-ablated in the first buildup layer. The
laser-ablated artifacts in the first buildup layer are filled with a
first metal layer to form a first electrically conductive pattern in the
first build up layer. The operations of forming a buildup layer, forming
laser-ablated artifacts in the buildup layer, and filling the
laser-ablated artifacts with an electrically conductive material to form
an electrically conductive pattern can be performed any one of a number
of times to achieve the desired redistribution.