A membrane structure is provided. The membrane structure includes a
polymer layer having a plurality of pores; and a ceramic layer disposed
on the polymer layer. The ceramic layer has a plurality of substantially
unconnected pores. Each of the substantially unconnected pores is in
fluid communication with at least one of the pores of the polymer layer.
A method of manufacturing a membrane structure is provided. The method
includes the steps of providing a polymer layer having a plurality of
pores; and disposing a ceramic layer on the polymer layer. Disposing a
ceramic layer includes depositing a metal layer on the polymer layer; and
anodizing the metal layer to convert the metal layer into a porous layer.
At least one of the depositing step and the anodizing step is performed
as a continuous process. Alternatively, at least one of the depositing
and the anodizing step is performed as a batch process.