One embodiment of a MEMS flow module (34) includes a first plate (36) and
a second plate (48) that are separated by a first link (62). A plurality
of concentrically disposed, annular flow-restricting walls (40) extend
from the first plate (36), and each is separated from the second plate
(48) by a flow-restricting gap (58). When the MEMS flow module (34) is
exposed to a differential pressure and in one configuration, a perimeter
(46) of the first plate (36) flexes away from the second plate (48) (and
at least generally about where the first link (62) interfaces with the
first plate (36)) to increase the size of one or more of the
flow-restricting gaps (58), to in turn accommodate an increased flow or
flow rate through the MEMS flow module (34).