Disclosed are an X-ray target having a micro focus size and capable of
producing X-rays of high intensity, and apparatuses using such an X-ray
target. The X-ray target (1) has a structure in which a first cap layer
(21), a target layer (22), and a second cap layer (23) are successively
laminated, wherein the first and second cap layers (21 and 23) are each
composed of a material which is lower in electron beam absorptivity than
that of which the target layer (22) is composed. An X-ray generator using
the X-ray target (1) can generate highly intense and nanofocus (several
nm) X-rays (17). Using the X-ray generator, an X-ray microscope allows
obtaining a high resolution transmission image, an X-ray diffraction
apparatus allows obtaining an X-ray diffraction image of a very small
area, and a fluorescent X-ray analysis apparatus allows making the
fluorescent X-ray analysis of a minute area.