A microelectromechanical (MEMS) device includes a substrate and a movable
layer mechanically coupled to the substrate. The movable layer moves from
a first position to a second position at a first rate and from the second
position to the first position at a second rate faster than the first
rate. The MEMS device further includes an adjustable cavity defined
between the substrate and the movable layer and containing a fluid. The
MEMS device further includes a fluid conductive element through which the
fluid flows at a first flowrate from inside the cavity to outside the
cavity upon movement of the movable layer from the second position to the
first position and through which the fluid flows at a second flowrate
slower than the first flowrate from outside the cavity to inside the
cavity upon movement of the movable layer from the first position to the
second position.