An illumination system for a microlithography projection exposure
apparatus has a light distribution device (21), which generates a
two-dimensional intensity distribution from the light from a primary
light source, for example a laser, in a first surface (25) of the
illumination system. A fly's eye condenser (55) having a first and a
second raster arrangement (40) of optical elements serves as a light
mixing device for homogenizing the illumination in the illumination field
of the illumination system. The fly's eye condenser has a first raster
arrangement (35) of first raster elements (36) and also a second raster
arrangement (40) of second raster elements (41). The light distribution
device comprises at least one diffractive optical element (21) for
generating an angular distribution whose far field has separate or
contiguous luminous zones which are coordinated with the form and size of
the first raster elements (36).