A micro-relay includes a first substrate having stationary contacts and a stationary electrode, a second substrate arranged so as to face the first substrate, and a movable plate arranged between the first and second substrates. The movable plate has a frame and a movable portion. The frame is sandwiched between the first and second substrates to realize a hermetical sealed structure. The movable portion has a movable electrode facing the stationary electrode, and a movable contact faces the stationary contacts. The movable portion moves between the first and second substrates due to electrostatic attraction that develops between the movable electrode and the stationary electrode.

 
Web www.patentalert.com

< Photoelectric conversion device and solid-state imaging device

> Radiation image conversion panel and preparation method thereof

> Chip stack package utilizing a dummy pattern die between stacked chips for reducing package size

~ 00528