A nanomechanical (NEMS) gyroscope includes an integrated circuit
substrate, a pair of spaced apart contact pads disposed on the substrate,
and a movable nanoscale element forming at least a portion of a first
electrically conductive path electrically coupling the contact pads. The
movable element experiences movement comprising rotation, changes in
rotation, or oscillation upon the gyroscope experiencing angular velocity
or angular acceleration. Movement of the gyro introduces geometrically
induced phase changes which results in phase and/or frequency changes in
ac current flowing through the movable element. An inertial measurement
unit (IMU) can include an integrated circuit substrate having a three
axis gyroscope formed on the substrate and a three axis accelerometer,
which is preferably formed on the same substrate.