Fracture-resistant gallium nitride substrate, and methods of testing for
and manufacturing such substrates are made available. A gallium nitride
substrate (10) is provided with a front side (12) polished to a
mirrorlike finish, a back side (14) on the substrate side that is the
opposite of the front side (12). A damaged layer (16) whose thickness d
is 30 .mu.m or less is formed on the back side (14). Given that the
strength of the front side (12) is I.sub.1 and the strength of the back
side (14) is I.sub.2, then the ratio I.sub.2/I.sub.1 is 0.46 or more.