A parousiameter having a dual beam setup and method for use thereof is
provided for producing measurements of optical parameters. The dual beam
parousiameter includes a hemispherical dome enclosure 318 sealed at the
bottom with a base 320. A radiation source 302 produces radiation in two
beams, an illumination beam 304 for illuminating a sample surface 308 and
a calibration beam 330 for providing optical characterization information
about the illumination beam 304. Each beam is guided into the
hemispherical dome enclosure 318 via separate optical paths. An optical
imaging device 324 is positioned to acquire an image of scatter radiation
314 scattered by the sample surface 308 illuminated by the illumination
beam 304, and acquire an image of the calibration beam, simultaneously.
The calibration beam image is used to compensate for variability in
optical output of the radiation source 302 when analyzing the scatter
radiation data.