A plating method is capable of mechanically and electrochemically
preferentially depositing a plated film in fine interconnect recesses
such as trenches and via holes, and depositing the plated film to a
flatter surface. The plating method including: disposing a substrate
having fine interconnect recesses such that a conductive layer faces an
anode; disposing a porous member between the substrate and the anode;
filling a plating solution between the substrate and the anode; and
repeating a process of holding the conductive layer and the porous member
in contact with each other and moving the conductive layer and the porous
member relatively to each other, a process of passing an electric current
between the conductive layer and the anode while keeping the conductive
layer still with respect to the porous member, and a process of stopping
the supply of the electric current between the conductive layer and the
anode.