Disclosed herein is a method of fabricating nano-components using
nanoplates, including the steps of: printing a grid on a substrate using
photolithography and Electron Beam Lithography; spraying an aqueous
solution dispersed with nanoplates onto the grid portion to position the
nanoplates on the substrate; depositing a protective film of a
predetermined thickness on the substrate and the nanoplates positioned on
the substrate; ion-etching the nanoplates deposited with the protective
film by using a Focused Ion Beam (FIB) or Electron Beam Lithography; and
eliminating the protective film remaining on the substrate using a
protective film remover after the ion-etching of the nanoplates, and a
method of manufacturing nanomachines or nanostructures by transporting
such nano-components using a nano probe and assembling with other
nano-components. The present invention makes it possible to fabricate the
high-quality nano-components in a more simple and easier manner at a
lower cost, as compared to other conventional methods. Further, the
present invention provides a method of implementing nanomachines through
combination of such nano-components and biomolecules, etc.