It is an object of the present invention to provide a laser irradiation
apparatus which can form a linear beam spot with a short optical path
length, form a linear beam spot being long in a long-side direction, and
reduce displacement of a condensing point at opposite ends in a direction
of its line. In a laser irradiation apparatus having an optical system
for shaping a laser beam emitted from a laser oscillator into a linear
beam spot having a long-side direction and a short-side direction, the
optical system includes a long-side direction condensing cylindrical lens
disposed between a first short-side direction condensing cylindrical lens
and a second short-side direction condensing cylindrical lens.
Displacement of a position of a homogeneous plane is generated by the
long-side direction condensing cylindrical lens so that a distance from
the homogeneous plane to the second short-side direction condensing
cylindrical lens is constant not depending on a field angle.