A method of forming a plurality of capacitors includes an insulative
material received over a capacitor array area and a circuitry area. The
array area comprises a plurality of capacitor electrode openings within
the insulative material received over individual capacitor storage node
locations. The intervening area comprises a trench. Conductive material
is formed within the openings and against a sidewall portion of the
trench to less than completely fill the trench. Conductive material
received over the trench sidewall portion is covered with a silicon
nitride-comprising layer which less than fills remaining trench volume.
The insulative material within the array area and the silicon
nitride-comprising layer are etched with a liquid etching solution
effective to expose outer sidewall portions of the conductive material
within the array area and to expose the conductive material within the
trench. The conductive material within the array area is incorporated
into a plurality of capacitors.