A dicing blade (2) which rotates at high speed is surrounded by a case
(3). A semiconductor wafer (1) is cut by a dicing device in which the
case is filled with a cooling water (4). The case (3) is provided with a
cooling water nozzle (8) for continuously supplying the cooling water and
a gap (10) for discharging the cooling water out of the case. By
adjusting a supply rate and a discharge rate of the cooling water, a
proper water pressure can be applied to an inside of the case, thereby
making it possible to cool the dicing blade and the cutting point with
efficiency. As a result, it is possible to suppress chipping and cracking
of the semiconductor device due to lack of cooling.