A package structure of a micro-electromechanical system (MEMS) type
microphone is disclosed. The MEMS microphone comprises a substrate, a
MEMS chip, an acoustic wave cover, and an encapsulant. The substrate has
connection pads. The MEMS chip is electrically coupled to the connection
pads. The MEMS chip includes an acoustic wave sensing portion. The
acoustic wave cover is fixed on the MEMS chip for covering without
contacting the acoustic wave sensing portion and defining an acoustic
wave cavity space. The acoustic wave cover has an opening for allowing an
acoustic wave to enter or exit out of the acoustic cavity space. The
encapsulant encapsulates the substrate, the MEMS chip, and the acoustic
wave cover, wherein a surface of the acoustic wave cover is exposed. The
exposed surface of the acoustic wave cover is along the same level as the
surface of the encapsulant.