A substrate carrying apparatus includes an arm body; supporting portion
provided in the arm body and adapted to support a region inside the
periphery of the rear face of the substrate; a one-side restricting
portion and an other-side restricting portion provided at opposite
positions across the periphery of the substrate to restrict the
peripheral positions of the substrate; and liquid receivers provided
between each supporting portion and each restricting portion. A liquid
drop attached to the rear peripheral portion of the substrate flows down
on the bottom face of each liquid receiver. Even though repeated
substrate carrying operations are performed and thus the liquid drop is
accumulated in each liquid receiver, there is no risk that the liquid
drop in each liquid receiver would be scattered in the air by the action
of the periphery of the substrate and hence the scattered liquid would be
attached again onto the surface of the substrate.