Measure of forming an EL layer by selectively depositing through
evaporation a material for forming the EL layer at a desired location is
provided. When a material for forming an EL layer is deposited, a mask
(113) is provided between a sample boat (111) and a substrate (110). By
applying voltage to the mask (113), the direction of progress of the
material for forming the EL layer is controlled to be selectively
deposited at a desired location.