An adhesive sheet for laser dicing is used for dicing a workpiece into individual chips by light absorption ablation of laser beam and has at least an adhesive layer on one side of a base material which has a surface opposite to the adhesive layer having no convex parts of width (W) of 20 mm or less and height (h) of 1 .mu.m or more, or no concave parts of width (W) of 20 mm or less and depth (d) of 1 .mu.m or more.

 
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< Chip and wafer integration process using vertical connections

> Memory module that is capable of controlling input/output in accordance with type of memory chip

> Semiconductor device and method for fabricating the same

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