An electrostatic chuck includes a base of a sintered body containing
alumina, an electrode as a power-supplied member embedded in the base and
supplied with electric power, a bonding member embedded in the base and
bonded to the electrode, in which a difference in coefficient of thermal
expansion from the sintered body is 2.times.10.sup.-6/K or less, and a
melting point is higher than baking temperature of the sintered body, and
a terminal bonded to the electrode through the bonding member.