A method, system and computer program product for verifying printability
of a mask layout for a photolithographic process are disclosed. A
simulation of the photolithographic process for the designed mask layout
is simulated using a simplified version of the mask layout with a lower
accuracy to generate a lower accuracy simulated image. Where the lower
accuracy simulated image is determined as potentially including an error,
a further simulation of the designated portion of the mask layout with a
higher accuracy will be performed.