An image correction device for use in a pattern inspection apparatus is
disclosed, which has automatic adaptability to variations in density of a
pattern image of a workpiece being tested. The device is operable to
identify a two-dimensional (2D) linear predictive model parameters from
the pattern image of interest and determine the value of a total sum of
these identified parameters. This value is then used to switch between a
corrected pattern image due to the 2D linear prediction modeling and a
corrected image that is interpolated by bicubic interpolation techniques.
A pattern inspection method using the image correction technique is also
disclosed.