High magnetic moment films FeCo(X, Y), where X is a transition metal
element and Y is a rare earth element are formed using off-axis static
deposition techniques. The films have tunable magnetic anisotropy from 0
Oe to greater than 500 Oe that are thermally stable beyond nominal
photoresist curing temperatures. By using off-axis static deposited
FeCo(X, Y) films as seed layers to normally deposited FeCo films, inplane
anisotropy and the magnetic moment can be controlled for specific design
needs. Epitaxial-like growth (column-to-column matching) from the
off-axis static FeCo(X,Y) seed layers to normally deposited FeCo films is
attributed to sustained anisotropy in the entire film.