An apparatus includes a first capacitive sensor connected to a first
supply voltage, a second capacitive sensor connected to a second supply
voltage, a sensing circuit for producing a sense voltage in response to
current flowing in the first and second capacitive sensors, a first mixer
for combining the sense voltage with a first reference voltage to produce
a first signal representative of in-plane displacement between electrodes
of the first and second capacitive sensors, and a second mixer for
combining the sense voltage with a second reference voltage to produce a
second signal representative of out-of-plane displacement between the
electrodes of the first and second capacitive sensors.