A method and apparatus to create two dimensional and three dimensional
structures using a maskless photolithography system is provided. In an
embodiment, the pattern generator comprises a micromirror array wherein
the positioning of the mirrors in the micromirror array and the time
duration of exposure can be modulated to produce patterns to photoform
photosensitive material. The desired pattern can be designed and stored
using conventional computer aided drawing techniques and can be used to
control the positioning of the individual mirrors in the micromirror
array to reflect the corresponding desired pattern. A fixture for
mounting of the substrate can be incorporated and can allow the substrate
to be moved three dimensions. The fixture can be rotated in one, two, or
three directions.