A coil is provided for use in a semiconductor processing system to
generate a plasma with a magnetic field in a chamber. The coil comprises
a first coil segment, a second coil segment and an internal balance
capacitor. The first coils segment has a first end and a second end. The
first end of the coil segment is adapted to connect to a power source.
The second coil segment has a first and second end. The second end of the
first coil segment is adapted to connect to an external balance
capacitor. The internal balance capacitor is connected in series between
the second end of the first coil segment and the first end of the second
coil segment. The internal balance capacitor and the coil segments are
adapted to provide a voltage peak along the first coil segment
substantially aligned with a virtual ground along the second coil
segment.