The invention relates to micromechanical mirrors with a high-reflection
coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV)
spectral range, based on a substrate which is coated with an aluminum
layer and a transparent blooming coating. Likewise the invention relates
to a method for the production of such micromechanical layers with a
high-reflection coating and to the use thereof for the production of
microsensors, optical data stores or video and data projection displays.