A catadioptric projection objective has, along an optical axis, a concave
mirror; a positive lens group with positive refractive power arranged
adjacent to the concave mirror and spaced apart therefrom; a first prism
and a second prism each having respective first fiat surfaces and second
flat surfaces, wherein the second flat surfaces are arranged adjacent to
the positive lens group and on opposite sides of the optical axis, and
wherein the first flat surfaces are arranged adjacent to an object plane
and an image plane, respectively, of the projection objective. The
projection objective has unit magnification and at least one focus at a
wavelength in a design wavelength band that includes mercury g-, h- and
i-lines. At least the thickest optical element of the positive lens group
and the first and second prism are made from optical material having an
absorption coefficient k<0.001 cm.sup.-1 in the design wavelength
band.