In optical measurement utilizing total reflection, various types of
measurement are selectively performed. The invention provides an optical
measurement apparatus using total reflection, including a light source, a
measurement optical system, and a light detector. The measurement optical
system is an infinity-corrected positive lens formed of an optical member
having a planar surface orthogonal to an optical axis of the measurement
optical system at a front focal position. One side of the optical axis of
the measurement optical system is used as a projection optical system for
radiating measurement light onto a specimen, and another side is used as
a photometric optical system for acquiring reflected light from the
specimen. The light source is disposed at an entrance pupil position on
the projection optical system side or at a position conjugate to the
entrance pupil position and moves in an entrance pupil plane or in a
plane conjugate to the entrance pupil position, along a straight line
orthogonal to the optical axis, while a distance from the optical axis is
detected. The light detector is disposed at an exit pupil position on the
photometric optical system side or at a position conjugate to the exit
pupil position. The optical-measurement apparatus comprises a
light-source changing unit configured to change the position or shape of
the light source.