A method and a device for a spatially resolved examination and evaluation of the properties of surfaces, in particular such properties of surfaces which affect the optical impression which the surface makes. A defined radiation is directed at a first predetermined solid angle to an examined surface. Furthermore, at least a portion of the radiation affected by the examined surface in particular by diffusion and reflection, is detected at a second predefined solid angle. At least one measured variable is spatially resolved captured which characterizes at least one predetermined property of the radiation affected by the examined surface. At least over a portion of the spatially resolved measured values at least one statistical parameter for characterizing the surface is determined.

 
Web www.patentalert.com

< Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample

> High resolution monitoring of CD variations

> Test method for the testing of the functional capability of a monitoring sensor, monitoring method and monitoring sensor

~ 00537