A catalyst supporting substrate includes a first region (54) which is
formed on a substrate (50); and a second region (55) which is formed
covering a part of the first region. The first region (54) includes a
catalyst supporting portion (54a) containing a first material. The second
region (55) includes a catalyst portion (55) containing a second material
which is different from the first material. The first material includes a
metal containing at least one of elements selected from the second group
to the fourteenth group of the periodic table or a compound thereof. The
second material is a catalyst which grows carbon nanotubes in a vapor
phase.