An improved interconnection system is described, such as for electrical
contactors and connectors, electronic device or module package
assemblies, socket assemblies, and/or probe card assembly systems. An
exemplary connector comprises a first connector structure comprising a
contactor substrate having a contact surface and a bonding surface, and
one or more electrically conductive micro-fabricated spring contacts
extending from the probe surface, a second connector structure comprising
at least one substrate and having a set of at least one electrically
conductive contact pad located on a connector surface and corresponding
to the set of spring contacts, and means for movably positioning and
aligning the first connector structure and the second connector structure
between at least a first position and a second position, such that in at
least one position, at least one electrically conductive micro-fabricated
spring contact is electrically connected to at least one electrically
conductive contact pad.