A pattern having exceptionally small features is formed on a partially
fabricated integrated circuit during integrated circuit fabrication. The
pattern comprises features formed by self-organizing material, such as
diblock copolymers. The organization of the copolymers is directed by
spacers which have been formed by a pitch multiplication process in which
spacers are formed at the sides of sacrificial mandrels, which are later
removed to leave spaced-apart, free-standing spacers. Diblock copolymers,
composed of two immiscible block species, are deposited over and in the
space between the spacers. The copolymers are made to self-organize, with
each block species aggregating with other block species of the same type.