In an angularly resolved scatterometer, an aperture plate including at
least one obscuration extending into the image of the pupil plane is
provided. Defocus values of a target pattern are determined from the
radial distance between the innermost point of the images of the
obscurations and the nominal center if the pupil image. Defocus errors
are compensated for by capturing a plurality of normalization images
using a reference plate at a plurality of different defocus positions and
subtracting a suitable normalization from the measurement spectrum of a
target pattern.