A double exposure method for enhancing the image resolution in a
lithographic system, is presented herein. The invention comprises
decomposing a desired pattern to be printed on the substrate into at
least two constituent sub-patterns that are capable of being optically
resolved by the lithographic system, coating the substrate with a first
positive tone resist layer and a thin second positive tone resist layer
on top of a target layer which is to be patterned with the desired dense
line pattern. The second resist material is absorbing exposure radiation
during a first patterning exposure and after development during a second
patterning exposure to prevent exposure above energy-to-clear of at least
a portion of the first resist material underneath exposed portions of the
second resist material layer.