There is a need for a piezoelectric element capable of improving a
productivity and a yield without impairing the piezoelectric
characteristic and a method for manufacturing the same. A piezoelectric
element is provided with a substrate, a first electrode film disposed on
the substrate, a piezoelectric film disposed on the first electrode film,
and a second electrode film disposed on the piezoelectric film. The
piezoelectric film has a laminated structure composed of a plurality of
crystallized piezoelectric thin films. The piezoelectric film having a
predetermined thickness is formed by repeated cycles of a film formation
step of forming a piezoelectric thin film and a crystallization heat
treatment step of heat-treating the piezoelectric thin film to effect
crystallization. In this manner, a piezoelectric film exhibiting uniform
crystallinity in the film thickness direction may be produced.