An electrolytic copper plating process comprising two steps is proposed.
The process is particularly suited to plating in very confined spaces.
The first step comprises a pre-treatment solution comprising an
anti-suppressor that comprises a sulfur containing organic compound,
preferably incorporating an alkane sulfonate group or groups and/or an
alkane sulfonic acid. The second step comprises an electrolytic copper
plating solution based on an alkane sulfonic acid.