A set of candidate global optima is identified, one of which is a global
solution for making a mask for printing a lithographic pattern. A
solution space is formed from dominant joint eigenvectors that is
constrained for bright and dark areas of the printed pattern. The
solution space is mapped to identify regions each containing at most one
local minimum intensity. For each selected region, stepped intensity
contours are generated for intensity of the dark areas and stepped
constraint surfaces are generated for a target exposure dose at an
individual test point. An individual test point is stepped toward a
lowest intensity contour along the stepped constraint surfaces of each
selected region. Further lowering of the intensities of these points is
also detailed, where possible in adjacent regions, to yield final test
points. The set of candidate global optima is the final test points at
their respective lowest intensity contour of the respective selected
regions.