A composite photoresist comprises a photoresist material and a filler
material dispersed within the photoresist material, wherein the filler
material includes a plurality of nanoparticles. The photoresist material
may comprise an acrylic-based photoresist, a novolak-based photoresist, a
polyhydroxystyrene-based photoresist, a SLAM, or a BARC. The filler
material may comprise base-soluble styrene-butadiene rubber nanospheres,
nitrile-butadiene rubber nanospheres, polystyrene-based nanoparticles,
acrylic-based nanoparticles, or inorganic nanoparticles. The
nanoparticles may have an average diameter that is between around 10 nm
and around 1000 nm and may have a loading in the photoresist material
that is between around 5% and 50%. The composite photoresist may be used
to form die-side metal bumps for use in a C4 connection that have a
roughened sidewall surface but a smooth top surface.