A stacked ferroelectric memory device has selection transistors including
a first gate structure, a first impurity region, a second impurity
region, a first insulating interlayer covering the selection transistors,
bit line structures electrically connected to the first impurity regions,
a second insulating interlayer covering the bit line structures, doped
single crystalline silicon plugs formed through the first and the second
insulating interlayers, each of which contacts the second impurity region
and has a height greater than that of the bit line structures, active
patterns disposed on the plugs and the second insulating interlayer, each
of which contacts the plugs, and ferroelectric transistors disposed on
the active patterns, each of which has a second gate structure including
a ferroelectric layer pattern and a conductive pattern, a third impurity
region and a fourth impurity region. The ferroelectric memory device
performs a random access operation and has a high degree of integration.