A semiconductor device having a metal-insulator-metal (MIM) capacitor is provided and can include a lower line formed in a semiconductor substrate; a first interlayer insulating layer formed over the semiconductor substrate, the first interlayer insulating layer having a first conductor and a second conductor electrically connected to the lower line; a second interlayer insulating layer formed over the first interlayer insulating layer, the second interlayer insulating layer including a first via hole and a second via hole connected to the first conductor and the second conductor, respectively; a lower electrode line formed in the first via hole, the lower electrode including a first barrier metal layer, a second barrier metal layer, a second copper seed layer, and a copper layer; and a capacitor formed in the second via hole, the capacitor including the first barrier metal layer, a dielectric layer, the second barrier metal layer and the second copper seed layer.