A method for measuring a synchronization error between a first stage and a
second stage in a scanning exposure apparatus including the first stage
which supports a reticle, the second stage which supports a substrate,
and a projection optical system which projects a pattern of the reticle
onto the substrate, the method comprises the steps of measuring, using a
measurement unit, a light intensity distribution formed by a measurement
pattern while synchronously scanning a measurement mask which has the
measurement pattern and is arranged on the first stage, and the
measurement unit arranged on the second stage, and calculating the
synchronization error between the first stage and the second stage based
on a time change in the light intensity distribution measured in the
measuring step.