A MEMS switch and a method of manufacturing the same are disclosed. The
MEMS switch includes: a substrate including a trench, a ground line and a
signal line having an opened portion; a moving plate separated from the
substrate at a predetermined space and including a contact member for
connecting an electrode plate and the opened portion and having a deep
corrugate to insert the trench; and a supporting member for supporting
the moving plate. Such a MEMS switch prevents the thermal expansion and
the stiction problem.